@article{oai:sgul.repo.nii.ac.jp:00001067, author = {梅沢, 利二}, issue = {2}, journal = {社会情報 = Social Information}, month = {Mar}, note = {Bulletin}, pages = {135--141}, title = {AES及びXPS分光分析法による窒素チタンスパッタ膜のキャラクタリゼイション}, volume = {3}, year = {1994} }